SCA3100-D04-004

MEMS Sensors

Murata Electronics MEMS Sensors are robust structures that are very sensitive to inertial forces and pressure but are insensitive to other environmental variables and causes of failure. Murata's silicon capacitive sensors are made of single-crystal silicon and glass. These materials ensure exceptional reliability, unprecedented accuracy, and excellent stability over time and temperature. MEMS are inherently hermetically sealed in a wafer-level process for reduced packaging requirements. No particles or chemicals can enter the capped sensor, ensuring reliability. Depending on the needs of the application, the accelerometer, gyroscope, and pressure sensor elements can be designed for a specific sensitivity, measuring range, and frequency response. Gyroscopes can be used for signals as small as the earth's rotation and as large as tracking the motion of a human hand.